Improved Tangent Space-Based Distance Metric for Lithographic Hotspot Classification

Fan Yang, Subarna Sinha, Charles C. Chiang, Xuan Zeng 0001, Dian Zhou. Improved Tangent Space-Based Distance Metric for Lithographic Hotspot Classification. IEEE Trans. on CAD of Integrated Circuits and Systems, 36(9):1545-1556, 2017. [doi]

Abstract

Abstract is missing.