Optimal one-wafer cyclic scheduling analysis of hybrid multi-cluster tools with one-space buffering module - researchr publication authors

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FaJun Yang, Naiqi Wu, Yan Qiao, MengChu Zhou. Optimal one-wafer cyclic scheduling analysis of hybrid multi-cluster tools with one-space buffering module. In 2014 IEEE International Conference on Robotics and Automation, ICRA 2014, Hong Kong, China, May 31 - June 7, 2014. pages 3279-3284, IEEE, 2014. [doi]

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