FaJun Yang, Naiqi Wu, Yan Qiao, MengChu Zhou. Optimal one-wafer cyclic scheduling analysis of hybrid multi-cluster tools with one-space buffering module. In 2014 IEEE International Conference on Robotics and Automation, ICRA 2014, Hong Kong, China, May 31 - June 7, 2014. pages 3279-3284, IEEE, 2014. [doi]
@inproceedings{YangWQZ14,
title = {Optimal one-wafer cyclic scheduling analysis of hybrid multi-cluster tools with one-space buffering module},
author = {FaJun Yang and Naiqi Wu and Yan Qiao and MengChu Zhou},
year = {2014},
doi = {10.1109/ICRA.2014.6907330},
url = {http://dx.doi.org/10.1109/ICRA.2014.6907330},
researchr = {https://researchr.org/publication/YangWQZ14},
cites = {0},
citedby = {0},
pages = {3279-3284},
booktitle = {2014 IEEE International Conference on Robotics and Automation, ICRA 2014, Hong Kong, China, May 31 - June 7, 2014},
publisher = {IEEE},
}