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Cyclic Scheduling Analysis of Single-arm Cluster Tools with Wafer Residency Time Constraint and Chamber Cleaning Operations

FaJun Yang, Naiqi Wu, Rong Su, Yan Qiao. Cyclic Scheduling Analysis of Single-arm Cluster Tools with Wafer Residency Time Constraint and Chamber Cleaning Operations. In 14th IEEE International Conference on Automation Science and Engineering, CASE 2018, Munich, Germany, August 20-24, 2018. pages 241-246, IEEE, 2018. [doi]

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