Liangliang Yang, Yunfei Zhou, Haihong Pan, Wei Teng. Realization of the Synchronization Mechanism of Step and Scan Projection Lithography. In Caihua Xiong, Honghai Liu, Yongan Huang, Youlun Xiong, editors, Intelligent Robotics and Applications, First International Conference, ICIRA 2008, Wuhan, China, October 15-17, 2008 Proceedings, Part II. Volume 5315 of Lecture Notes in Computer Science, pages 151-161, Springer, 2008. [doi]
Abstract is missing.