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Infrastructure for Successful BEOL Yield Ramp, Transfer to Manufacturing, and DFM Characterization at 65 nm and Below

Greg Yeric, Ethan Cohen, John Garcia, Kurt Davis, Esam Salem, Gary Green. Infrastructure for Successful BEOL Yield Ramp, Transfer to Manufacturing, and DFM Characterization at 65 nm and Below. IEEE Design & Test of Computers, 22(3):232-239, 2005. [doi]

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