Novel Honeycomb SOI Structure with Low Parasitic Capacitance for Human-Sensing Accelerometer - researchr publication authors

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Tokuji Yokomatsu, Haruka Takeuchi, Yoshikazu Miyagawa, Kensuke Kanda, Takayuki Fujita, Kohei Higuchi, Kazusuke Maenaka. Novel Honeycomb SOI Structure with Low Parasitic Capacitance for Human-Sensing Accelerometer. In 2012 Fifth International Conference on Emerging Trends in Engineering and Technology, Himeji, Japan, November 5-7, 2012. pages 70-74, IEEE, 2012. [doi]

This author has not been identified. Look up 'Tokuji Yokomatsu' in GoogleThis author has not been identified. Look up 'Haruka Takeuchi' in GoogleThis author has not been identified. Look up 'Yoshikazu Miyagawa' in GoogleThis author has not been identified. Look up 'Kensuke Kanda' in GoogleThis author has not been identified. Look up 'Takayuki Fujita' in GoogleThis author has not been identified. Look up 'Kohei Higuchi' in GoogleThis author has not been identified. Look up 'Kazusuke Maenaka' in Google

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