Tokuji Yokomatsu, Haruka Takeuchi, Yoshikazu Miyagawa, Kensuke Kanda, Takayuki Fujita, Kohei Higuchi, Kazusuke Maenaka. Novel Honeycomb SOI Structure with Low Parasitic Capacitance for Human-Sensing Accelerometer. In 2012 Fifth International Conference on Emerging Trends in Engineering and Technology, Himeji, Japan, November 5-7, 2012. pages 70-74, IEEE, 2012. [doi]
@inproceedings{YokomatsuTMKFHM12,
title = {Novel Honeycomb SOI Structure with Low Parasitic Capacitance for Human-Sensing Accelerometer},
author = {Tokuji Yokomatsu and Haruka Takeuchi and Yoshikazu Miyagawa and Kensuke Kanda and Takayuki Fujita and Kohei Higuchi and Kazusuke Maenaka},
year = {2012},
doi = {10.1109/ICETET.2012.21},
url = {http://dx.doi.org/10.1109/ICETET.2012.21},
researchr = {https://researchr.org/publication/YokomatsuTMKFHM12},
cites = {0},
citedby = {0},
pages = {70-74},
booktitle = {2012 Fifth International Conference on Emerging Trends in Engineering and Technology, Himeji, Japan, November 5-7, 2012},
publisher = {IEEE},
isbn = {978-1-4799-0276-7},
}