Tokuji Yokomatsu, Haruka Takeuchi, Yoshikazu Miyagawa, Kensuke Kanda, Takayuki Fujita, Kohei Higuchi, Kazusuke Maenaka. Novel Honeycomb SOI Structure with Low Parasitic Capacitance for Human-Sensing Accelerometer. In 2012 Fifth International Conference on Emerging Trends in Engineering and Technology, Himeji, Japan, November 5-7, 2012. pages 70-74, IEEE, 2012. [doi]
Abstract is missing.