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Fabrication Process of Nonarcing Power MEMS Switch

Yu Yonezawa, Noboru Wakatsuki, Yoshio Satoh, Tadashi Nakatani, Koichiro Sawa. Fabrication Process of Nonarcing Power MEMS Switch. IEICE Transactions, 88-C(8):1629-1634, 2005. [doi]

Authors

Yu Yonezawa

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Noboru Wakatsuki

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Yoshio Satoh

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Tadashi Nakatani

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Koichiro Sawa

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