Fabrication Process of Nonarcing Power MEMS Switch

Yu Yonezawa, Noboru Wakatsuki, Yoshio Satoh, Tadashi Nakatani, Koichiro Sawa. Fabrication Process of Nonarcing Power MEMS Switch. IEICE Transactions, 88-C(8):1629-1634, 2005. [doi]

Abstract

Abstract is missing.