Yu Yonezawa, Noboru Wakatsuki, Yoshio Satoh, Tadashi Nakatani, Koichiro Sawa. Fabrication Process of Nonarcing Power MEMS Switch. IEICE Transactions, 88-C(8):1629-1634, 2005. [doi]
@article{YonezawaWSNS05,
title = {Fabrication Process of Nonarcing Power MEMS Switch},
author = {Yu Yonezawa and Noboru Wakatsuki and Yoshio Satoh and Tadashi Nakatani and Koichiro Sawa},
year = {2005},
doi = {10.1093/ietele/e88-c.8.1629},
url = {http://dx.doi.org/10.1093/ietele/e88-c.8.1629},
researchr = {https://researchr.org/publication/YonezawaWSNS05},
cites = {0},
citedby = {0},
journal = {IEICE Transactions},
volume = {88-C},
number = {8},
pages = {1629-1634},
}