Efficient Real-Time Scheduling of Integrated Equipment in Semiconductor Fabrication

Hyun Joong Yoon, Doo Yong Lee. Efficient Real-Time Scheduling of Integrated Equipment in Semiconductor Fabrication. In Proceedings of the 2002 IEEE International Conference on Robotics and Automation, ICRA 2002, May 11-15, 2002, Washington, DC, USA. pages 3624-3629, IEEE, 2002.

Abstract

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