Effect of RF sputtering parameters on PZT crystal growth - researchr publication authors

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Miao Yu, T. Giffney, Kean C. Aw, Haixia Zhang. Effect of RF sputtering parameters on PZT crystal growth. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 821-824, IEEE, 2013. [doi]

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