Miao Yu, T. Giffney, Kean C. Aw, Haixia Zhang. Effect of RF sputtering parameters on PZT crystal growth. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 821-824, IEEE, 2013. [doi]
@inproceedings{YuGAZ13,
title = {Effect of RF sputtering parameters on PZT crystal growth},
author = {Miao Yu and T. Giffney and Kean C. Aw and Haixia Zhang},
year = {2013},
doi = {10.1109/NEMS.2013.6559851},
url = {http://dx.doi.org/10.1109/NEMS.2013.6559851},
researchr = {https://researchr.org/publication/YuGAZ13},
cites = {0},
citedby = {0},
pages = {821-824},
booktitle = {8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013},
publisher = {IEEE},
}