Precise width control of single crystalline silicon nano-wall structure based on wet etching process on (111) wafer - researchr publication authors

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Xiao Yu, Qinhua Jin, Tie Li, Yuelin Wang. Precise width control of single crystalline silicon nano-wall structure based on wet etching process on (111) wafer. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 278-281, IEEE, 2012. [doi]

This author has not been identified. Look up 'Xiao Yu' in GoogleThis author has not been identified. Look up 'Qinhua Jin' in GoogleThis author has not been identified. Look up 'Tie Li' in GoogleThis author has not been identified. Look up 'Yuelin Wang' in Google

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