Xiao Yu, Qinhua Jin, Tie Li, Yuelin Wang. Precise width control of single crystalline silicon nano-wall structure based on wet etching process on (111) wafer. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 278-281, IEEE, 2012. [doi]
Abstract is missing.