Xiao Yu, Qinhua Jin, Tie Li, Yuelin Wang. Precise width control of single crystalline silicon nano-wall structure based on wet etching process on (111) wafer. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 278-281, IEEE, 2012. [doi]
@inproceedings{YuJLW12,
title = {Precise width control of single crystalline silicon nano-wall structure based on wet etching process on (111) wafer},
author = {Xiao Yu and Qinhua Jin and Tie Li and Yuelin Wang},
year = {2012},
doi = {10.1109/NEMS.2012.6196774},
url = {http://dx.doi.org/10.1109/NEMS.2012.6196774},
researchr = {https://researchr.org/publication/YuJLW12},
cites = {0},
citedby = {0},
pages = {278-281},
booktitle = {7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012},
publisher = {IEEE},
isbn = {978-1-4673-1122-9},
}