5/W MIM capacitors with the thickness of the bottom W electrode - researchr publication authors

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D. Q. Yu, W. S. Lau, Hei Wong, Xuan Feng, Shurong Dong, Kin Leong Pey. 5/W MIM capacitors with the thickness of the bottom W electrode. Microelectronics Reliability, 61:95-98, 2016. [doi]

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