5/W MIM capacitors with the thickness of the bottom W electrode

D. Q. Yu, W. S. Lau, Hei Wong, Xuan Feng, Shurong Dong, Kin Leong Pey. 5/W MIM capacitors with the thickness of the bottom W electrode. Microelectronics Reliability, 61:95-98, 2016. [doi]

Abstract

Abstract is missing.