Development of a High-Performance Microaccelerometer With Position Independent Pure-Axial Stressed Piezoresistive Beams

Mingzhi Yu, Libo Zhao, Xiangguang Han, Chen Jia, Yong Xia, Ping Yang, Yun Zhang, Junjie Sun, Guangzhao Qin, Zhuangde Jiang. Development of a High-Performance Microaccelerometer With Position Independent Pure-Axial Stressed Piezoresistive Beams. IEEE Transactions on Industrial Electronics, 70(8):8546-8556, August 2023. [doi]

Authors

Mingzhi Yu

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Libo Zhao

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Xiangguang Han

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Chen Jia

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Yong Xia

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Ping Yang

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Yun Zhang

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Junjie Sun

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Guangzhao Qin

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Zhuangde Jiang

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