Development of a High-Performance Microaccelerometer With Position Independent Pure-Axial Stressed Piezoresistive Beams

Mingzhi Yu, Libo Zhao, Xiangguang Han, Chen Jia, Yong Xia, Ping Yang, Yun Zhang, Junjie Sun, Guangzhao Qin, Zhuangde Jiang. Development of a High-Performance Microaccelerometer With Position Independent Pure-Axial Stressed Piezoresistive Beams. IEEE Transactions on Industrial Electronics, 70(8):8546-8556, August 2023. [doi]

@article{YuZHJXYZSQJ23,
  title = {Development of a High-Performance Microaccelerometer With Position Independent Pure-Axial Stressed Piezoresistive Beams},
  author = {Mingzhi Yu and Libo Zhao and Xiangguang Han and Chen Jia and Yong Xia and Ping Yang and Yun Zhang and Junjie Sun and Guangzhao Qin and Zhuangde Jiang},
  year = {2023},
  month = {August},
  doi = {10.1109/TIE.2022.3217599},
  url = {https://doi.org/10.1109/TIE.2022.3217599},
  researchr = {https://researchr.org/publication/YuZHJXYZSQJ23},
  cites = {0},
  citedby = {0},
  journal = {IEEE Transactions on Industrial Electronics},
  volume = {70},
  number = {8},
  pages = {8546-8556},
}