Mingzhi Yu, Libo Zhao, Xiangguang Han, Chen Jia, Yong Xia, Ping Yang, Yun Zhang, Junjie Sun, Guangzhao Qin, Zhuangde Jiang. Development of a High-Performance Microaccelerometer With Position Independent Pure-Axial Stressed Piezoresistive Beams. IEEE Transactions on Industrial Electronics, 70(8):8546-8556, August 2023. [doi]
Abstract is missing.