Achievement of a high-sensitive and high-overload sensor based on the bossed-diaphragm structure

Zhongliang Yu, Yulong Zhao, Lili Li, Cun Li, Guanwu Zhou, Bian Tian. Achievement of a high-sensitive and high-overload sensor based on the bossed-diaphragm structure. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014. pages 186-190, IEEE, 2014. [doi]

Authors

Zhongliang Yu

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Yulong Zhao

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Lili Li

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Cun Li

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Guanwu Zhou

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Bian Tian

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