Zhongliang Yu, Yulong Zhao, Lili Li, Cun Li, Guanwu Zhou, Bian Tian. Achievement of a high-sensitive and high-overload sensor based on the bossed-diaphragm structure. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014. pages 186-190, IEEE, 2014. [doi]
@inproceedings{YuZLLZT14,
title = {Achievement of a high-sensitive and high-overload sensor based on the bossed-diaphragm structure},
author = {Zhongliang Yu and Yulong Zhao and Lili Li and Cun Li and Guanwu Zhou and Bian Tian},
year = {2014},
doi = {10.1109/NEMS.2014.6908787},
url = {https://doi.org/10.1109/NEMS.2014.6908787},
researchr = {https://researchr.org/publication/YuZLLZT14},
cites = {0},
citedby = {0},
pages = {186-190},
booktitle = {9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014},
publisher = {IEEE},
isbn = {978-1-4799-4726-3},
}