Zhongliang Yu, Yulong Zhao, Lili Li, Cun Li, Guanwu Zhou, Bian Tian. Achievement of a high-sensitive and high-overload sensor based on the bossed-diaphragm structure. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014. pages 186-190, IEEE, 2014. [doi]
Abstract is missing.