The improvement of electrochemical etching process for silicon microchannel plates

Ding Yuan, Pengliang Ci, Fei Tian, Jing Shi, Shaohui Xu, Peisheng Xin, Lianwei Wang. The improvement of electrochemical etching process for silicon microchannel plates. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 964-969, IEEE, 2009. [doi]

Abstract

Abstract is missing.