Mikail Yücetas, Mika Pulkkinen, Antti Kalanti, Jarno Salomaa, Lasse Aaltonen, Kari Halonen. A High-Resolution Accelerometer With Electrostatic Damping and Improved Supply Sensitivity. J. Solid-State Circuits, 47(7):1721-1730, 2012. [doi]
@article{YucetasPKSAH12,
title = {A High-Resolution Accelerometer With Electrostatic Damping and Improved Supply Sensitivity},
author = {Mikail Yücetas and Mika Pulkkinen and Antti Kalanti and Jarno Salomaa and Lasse Aaltonen and Kari Halonen},
year = {2012},
doi = {10.1109/JSSC.2012.2191675},
url = {http://dx.doi.org/10.1109/JSSC.2012.2191675},
researchr = {https://researchr.org/publication/YucetasPKSAH12},
cites = {0},
citedby = {0},
journal = {J. Solid-State Circuits},
volume = {47},
number = {7},
pages = {1721-1730},
}