Mikail Yücetas, Mika Pulkkinen, Antti Kalanti, Jarno Salomaa, Lasse Aaltonen, Kari Halonen. A High-Resolution Accelerometer With Electrostatic Damping and Improved Supply Sensitivity. J. Solid-State Circuits, 47(7):1721-1730, 2012. [doi]
Abstract is missing.