External Links

Cite Key

Statistics

  • References: 0
  • Cited by: 0
  • Reviews: 0
  • Bibliographies: 0

PDF

Researchr

Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.

Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.

Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook

Claude Yugma, Jakey Blue, Stéphane Dauzère-Pérès, Philippe Vialletelle. Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook. In 2014 IEEE International Conference on Automation Science and Engineering, CASE 2014, New Taipei, Taiwan, August 18-22, 2014. pages 93-98, IEEE, 2014. [doi]

Authors

Claude Yugma

This author has not been identified. Look up 'Claude Yugma' in Google

Jakey Blue

This author has not been identified. Look up 'Jakey Blue' in Google

Stéphane Dauzère-Pérès

This author has not been identified. Look up 'Stéphane Dauzère-Pérès' in Google

Philippe Vialletelle

This author has not been identified. Look up 'Philippe Vialletelle' in Google
runs on