Claude Yugma, Jakey Blue, Stéphane Dauzère-Pérès, Philippe Vialletelle. Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook. In 2014 IEEE International Conference on Automation Science and Engineering, CASE 2014, New Taipei, Taiwan, August 18-22, 2014. pages 93-98, IEEE, 2014. [doi]
@inproceedings{YugmaBDV14,
title = {Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook},
author = {Claude Yugma and Jakey Blue and Stéphane Dauzère-Pérès and Philippe Vialletelle},
year = {2014},
doi = {10.1109/CoASE.2014.6899310},
url = {http://dx.doi.org/10.1109/CoASE.2014.6899310},
researchr = {https://researchr.org/publication/YugmaBDV14},
cites = {0},
citedby = {0},
pages = {93-98},
booktitle = {2014 IEEE International Conference on Automation Science and Engineering, CASE 2014, New Taipei, Taiwan, August 18-22, 2014},
publisher = {IEEE},
}