Usama Zaghloul, George Papaioannou, Bharat Bhushan, Fabio Coccetti, Patrick Pons, Robert Plana. Erratum to "On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies" [MR 51/9-11 (2011) 1810-1818]. Microelectronics Reliability, 51(12):2416, 2011. [doi]
@article{ZaghloulPBCPP11a,
title = {Erratum to "On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies" [MR 51/9-11 (2011) 1810-1818]},
author = {Usama Zaghloul and George Papaioannou and Bharat Bhushan and Fabio Coccetti and Patrick Pons and Robert Plana},
year = {2011},
doi = {10.1016/j.microrel.2011.10.008},
url = {http://dx.doi.org/10.1016/j.microrel.2011.10.008},
researchr = {https://researchr.org/publication/ZaghloulPBCPP11a},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {51},
number = {12},
pages = {2416},
}