External Links

Cite Key

Statistics

  • References: 0
  • Cited by: 0
  • Reviews: 0
  • Bibliographies: 0

PDF

Researchr

Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.

Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.

Dielectric charging in silicon nitride films for MEMS capacitive switches: Effect of film thickness and deposition conditions

U. Zaghloul, G. Papaioannou, Fabio Coccetti, Patrick Pons, Robert Plana. Dielectric charging in silicon nitride films for MEMS capacitive switches: Effect of film thickness and deposition conditions. Microelectronics Reliability, 49(9-11):1309-1314, 2009. [doi]

Abstract

Abstract is missing.

runs on