Weihong Zhai, Xiupeng Shi, Zeng Zeng. Adaptive Modelling for Anomaly Detection and Defect Diagnosis in Semiconductor Smart Manufacturing: A Domain-specific AutoML. In IEEE International Conference on Cybernetics and Intelligent Systems, CIS 2023 and IEEE Conference on Robotics, Automation and Mechatronics, RAM 2023, Penang, Malaysia, June 9-12, 2023. pages 198-203, IEEE, 2023. [doi]
Abstract is missing.