Systematic Analyses of Passive Vibration Isolation System for Atomic Force Microscopes

Shenghang Zhai, Peng Yu, Jialin Shi, Tie Yang, Lianqing Liu. Systematic Analyses of Passive Vibration Isolation System for Atomic Force Microscopes. In Xin-Jun Liu, Zhenguo Nie, Jingjun Yu, Fugui Xie, Rui Song, editors, Intelligent Robotics and Applications - 14th International Conference, ICIRA 2021, Yantai, China, October 22-25, 2021, Proceedings, Part II. Volume 13014 of Lecture Notes in Computer Science, pages 428-439, Springer, 2021. [doi]

Abstract

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