Layout small-angle rotation and shift for EUV defect mitigation

Hongbo Zhang, Yuelin Du, Martin D. F. Wong, Yunfei Deng, Pawitter Mangat. Layout small-angle rotation and shift for EUV defect mitigation. In 2012 IEEE/ACM International Conference on Computer-Aided Design, ICCAD 2012, San Jose, CA, USA, November 5-8, 2012. pages 43-49, IEEE, 2012. [doi]

Abstract

Abstract is missing.