Calibration of Wafer Handling Robots: A Fixturing Approach

Mike Tao Zhang, Ken Goldberg. Calibration of Wafer Handling Robots: A Fixturing Approach. In IEEE Conference on Automation Science and Engineering, CASE 2007, September 22-25, 2007. Scottsdale, Arizona, USA. pages 255-260, IEEE, 2007. [doi]

Authors

Mike Tao Zhang

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Ken Goldberg

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