Calibration of Wafer Handling Robots: A Fixturing Approach

Mike Tao Zhang, Ken Goldberg. Calibration of Wafer Handling Robots: A Fixturing Approach. In IEEE Conference on Automation Science and Engineering, CASE 2007, September 22-25, 2007. Scottsdale, Arizona, USA. pages 255-260, IEEE, 2007. [doi]

@inproceedings{ZhangG07-3,
  title = {Calibration of Wafer Handling Robots: A Fixturing Approach},
  author = {Mike Tao Zhang and Ken Goldberg},
  year = {2007},
  doi = {10.1109/COASE.2007.4341769},
  url = {http://dx.doi.org/10.1109/COASE.2007.4341769},
  researchr = {https://researchr.org/publication/ZhangG07-3},
  cites = {0},
  citedby = {0},
  pages = {255-260},
  booktitle = {IEEE Conference on Automation Science and Engineering, CASE 2007, September 22-25, 2007. Scottsdale, Arizona, USA},
  publisher = {IEEE},
  isbn = {978-1-4244-1154-2},
}