A SOI sandwich differential capacitance accelerometer with low-stress package - researchr publication authors

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Yangxi Zhang, Chengchen Gao, Fanrui Meng, Yilong Hao. A SOI sandwich differential capacitance accelerometer with low-stress package. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014. pages 341-345, IEEE, 2014. [doi]

This author has not been identified. Look up 'Yangxi Zhang' in GoogleThis author has not been identified. Look up 'Chengchen Gao' in GoogleThis author has not been identified. Look up 'Fanrui Meng' in GoogleThis author has not been identified. Look up 'Yilong Hao' in Google

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