Yangxi Zhang, Chengchen Gao, Fanrui Meng, Yilong Hao. A SOI sandwich differential capacitance accelerometer with low-stress package. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014. pages 341-345, IEEE, 2014. [doi]
@inproceedings{ZhangGMH14,
title = {A SOI sandwich differential capacitance accelerometer with low-stress package},
author = {Yangxi Zhang and Chengchen Gao and Fanrui Meng and Yilong Hao},
year = {2014},
doi = {10.1109/NEMS.2014.6908822},
url = {https://doi.org/10.1109/NEMS.2014.6908822},
researchr = {https://researchr.org/publication/ZhangGMH14},
cites = {0},
citedby = {0},
pages = {341-345},
booktitle = {9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014},
publisher = {IEEE},
isbn = {978-1-4799-4726-3},
}