Yangxi Zhang, Chengchen Gao, Fanrui Meng, Yilong Hao. A SOI sandwich differential capacitance accelerometer with low-stress package. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014. pages 341-345, IEEE, 2014. [doi]
Abstract is missing.