Multi-criteria Dynamic Scheduling Methodology for Controlling a Semiconductor Wafer Fabrication System

Huai Zhang, Zhibin Jiang, Hongtao Hu 0001. Multi-criteria Dynamic Scheduling Methodology for Controlling a Semiconductor Wafer Fabrication System. In IEEE Conference on Automation Science and Engineering, CASE 2007, September 22-25, 2007. Scottsdale, Arizona, USA. pages 213-218, IEEE, 2007. [doi]

@inproceedings{ZhangJ007,
  title = {Multi-criteria Dynamic Scheduling Methodology for Controlling a Semiconductor Wafer Fabrication System},
  author = {Huai Zhang and Zhibin Jiang and Hongtao Hu 0001},
  year = {2007},
  doi = {10.1109/COASE.2007.4341681},
  url = {http://dx.doi.org/10.1109/COASE.2007.4341681},
  researchr = {https://researchr.org/publication/ZhangJ007},
  cites = {0},
  citedby = {0},
  pages = {213-218},
  booktitle = {IEEE Conference on Automation Science and Engineering, CASE 2007, September 22-25, 2007. Scottsdale, Arizona, USA},
  publisher = {IEEE},
  isbn = {978-1-4244-1154-2},
}