Simulation based real-time scheduling method for dispatching and rework control of semiconductor manufacturing system

Huai Zhang, Zhibin Jiang, Chengtao Guo. Simulation based real-time scheduling method for dispatching and rework control of semiconductor manufacturing system. In Proceedings of the IEEE International Conference on Systems, Man and Cybernetics, Montréal, Canada, 7-10 October 2007. pages 2901-2905, IEEE, 2007. [doi]

Authors

Huai Zhang

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Zhibin Jiang

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Chengtao Guo

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