Simulation based real-time scheduling method for dispatching and rework control of semiconductor manufacturing system

Huai Zhang, Zhibin Jiang, Chengtao Guo. Simulation based real-time scheduling method for dispatching and rework control of semiconductor manufacturing system. In Proceedings of the IEEE International Conference on Systems, Man and Cybernetics, Montréal, Canada, 7-10 October 2007. pages 2901-2905, IEEE, 2007. [doi]

Abstract

Abstract is missing.