Simulation based real-time scheduling method for dispatching and rework control of semiconductor manufacturing system

Huai Zhang, Zhibin Jiang, Chengtao Guo. Simulation based real-time scheduling method for dispatching and rework control of semiconductor manufacturing system. In Proceedings of the IEEE International Conference on Systems, Man and Cybernetics, Montréal, Canada, 7-10 October 2007. pages 2901-2905, IEEE, 2007. [doi]

@inproceedings{ZhangJG07,
  title = {Simulation based real-time scheduling method for dispatching and rework control of semiconductor manufacturing system},
  author = {Huai Zhang and Zhibin Jiang and Chengtao Guo},
  year = {2007},
  doi = {10.1109/ICSMC.2007.4413762},
  url = {http://dx.doi.org/10.1109/ICSMC.2007.4413762},
  tags = {control systems, rule-based},
  researchr = {https://researchr.org/publication/ZhangJG07},
  cites = {0},
  citedby = {0},
  pages = {2901-2905},
  booktitle = {Proceedings of the IEEE International Conference on Systems, Man and Cybernetics, Montréal, Canada, 7-10 October 2007},
  publisher = {IEEE},
}