Investigation of Potting-Adhesive-Induced Thermal Stress in MEMS Pressure Sensor

Yunfan Zhang, Bowen Li, Hui Li, Shengnan Shen, Feng Li, Wentao Ni, Wan Cao. Investigation of Potting-Adhesive-Induced Thermal Stress in MEMS Pressure Sensor. Sensors, 21(6):2011, 2021. [doi]

Abstract

Abstract is missing.