Synthesis of an event based deadlock avoidance supervisor for semiconductor manufacturing systems with choices in process flows

Wenle Zhang, Ziqiang John Mao. Synthesis of an event based deadlock avoidance supervisor for semiconductor manufacturing systems with choices in process flows. In 45th IEEE Conference on Decision and Control, CDC 2006, San Diego, CA, USA, 13-15 December, 2006. pages 4714-4719, IEEE, 2004. [doi]

Abstract

Abstract is missing.