A Novel Flexure Deflection Device with Damping Function: Towards Laser Reflector of 3D Lithography

Guixin Zhang, Hui Tang 0003, Xun Chen, Xiaohui Guo, Jiedong Li, Haoyu Pan, Shuo Li. A Novel Flexure Deflection Device with Damping Function: Towards Laser Reflector of 3D Lithography. In Haibin Yu, Jinguo Liu, Lianqing Liu, Zhaojie Ju, Yuwang Liu, Dalin Zhou, editors, Intelligent Robotics and Applications - 12th International Conference, ICIRA 2019, Shenyang, China, August 8-11, 2019, Proceedings, Part I. Volume 11740 of Lecture Notes in Computer Science, pages 393-400, Springer, 2019. [doi]

Abstract

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