Comparison Study of Three Readout Methods for a Capacitive MEMS Accelerometer

Hongcai Zhang, Xueyong Wei, Zhuangde Jiang. Comparison Study of Three Readout Methods for a Capacitive MEMS Accelerometer. In 2018 IEEE SENSORS, New Delhi, India, October 28-31, 2018. pages 1-4, IEEE, 2018. [doi]

Authors

Hongcai Zhang

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Xueyong Wei

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Zhuangde Jiang

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