Comparison Study of Three Readout Methods for a Capacitive MEMS Accelerometer

Hongcai Zhang, Xueyong Wei, Zhuangde Jiang. Comparison Study of Three Readout Methods for a Capacitive MEMS Accelerometer. In 2018 IEEE SENSORS, New Delhi, India, October 28-31, 2018. pages 1-4, IEEE, 2018. [doi]

@inproceedings{ZhangWJ18-2,
  title = {Comparison Study of Three Readout Methods for a Capacitive MEMS Accelerometer},
  author = {Hongcai Zhang and Xueyong Wei and Zhuangde Jiang},
  year = {2018},
  doi = {10.1109/ICSENS.2018.8589648},
  url = {https://doi.org/10.1109/ICSENS.2018.8589648},
  researchr = {https://researchr.org/publication/ZhangWJ18-2},
  cites = {0},
  citedby = {0},
  pages = {1-4},
  booktitle = {2018 IEEE SENSORS, New Delhi, India, October 28-31, 2018},
  publisher = {IEEE},
  isbn = {978-1-5386-4707-3},
}